Gaya APA
MEMS and microsystems: Design and manufacture. (2002).
New York:
McGraw-Hill.
Gaya Chicago
MEMS and microsystems: Design and manufacture.
~.
New York:
McGraw-Hill,
2002.
Buku.
Gaya MLA
MEMS and microsystems: Design and manufacture.
~.
New York:
McGraw-Hill,
2002.
Buku.
Gaya Turabian
MEMS and microsystems: Design and manufacture.
New York:
McGraw-Hill,
2002.
Buku.