Gaya APA

MEMS and microsystems: Design and manufacture. (2002). New York: McGraw-Hill.

Gaya Chicago

MEMS and microsystems: Design and manufacture. ~. New York: McGraw-Hill, 2002. Buku.

Gaya MLA

MEMS and microsystems: Design and manufacture. ~. New York: McGraw-Hill, 2002. Buku.

Gaya Turabian

MEMS and microsystems: Design and manufacture. New York: McGraw-Hill, 2002. Buku.